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深圳市英威兴达科技有限公司
主营：工业机器人维修,数控系统维修销售,伺服器维修销售,变频器维修销售 - 18718058889
深圳市英威兴达科技有限公司
主营：工业机器人维修,数控系统维修销售,伺服器维修销售,变频器维修销售
7
典型应用：
高密度等离子体化学气相淀积（HDP CVD）
等离子体增强化学气相沉积（PECVD）
刻蚀-RIE/ICP
物理气相沉积
等离子清洗
优点
更长的制程正常运行时间
更高的操作简易性和灵活性
*定制组件提前期的定制化性能
长期的使用简易性，节省成本
功能
精簡的流线型设计
标准的平台包装
高效率——低发热量
200和400 VAC 的输入选择
两个模拟用户端口选择
RS-232、以太网及 Profibus 通讯
多功能前面板
便利、全面的操作菜单
CEX（相位同步）操作模式
| CESAR? 1310 RF GENERATOR | ||||||||
| Specification | ||||||||
| Frequency | 13.560 MHz +/- 0.005% | |||||||
| Max output power | 1000 W into a 50 ? load | |||||||
| Min output power | 10 W into a 50 ? load | |||||||
| Reflected power limit | 200 W | |||||||
| Delivered power into mismatch | 20% depending on the load impedance | |||||||
| Load impedance | 50 ? | |||||||
| RF connector | 50 ?, N-type, female | |||||||
| RF power regulation mode | P forward, P delivered, or DC selfbias voltage | |||||||
| Regulation (of set point) | 1.0 or 0.1% of full-rated power, whichever is greater, into a 50 ? load | |||||||
| Response time (ms) | Consult factory. | |||||||
| Turn off/decay time (ms) | Consult factory. | |||||||
| Harmonics | -50 dBc at full-rated power | |||||||
| Spurious content | -60 dBc max at full-rated power | |||||||
| Pulse mode | Yes | |||||||
| Pulse repetition frequency | 1 to 30 kHz | |||||||
| Consult factory. | ||||||||
| Pulse duty cycle | 1% to 99% | |||||||
| Consult factory. | ||||||||
| Pulse RF envelope rise / fall time (ms) | Consult factory. | |||||||
| CEX operation mode | Yes | |||||||
| CEX input ** as required | 0 to +10 dbm | |||||||
| CEX output ** specifications | +3 to +10 dbm | |||||||
| CEX connector (50 ?) | BNC, female | |||||||
| Display | LCD graphic display | |||||||
| 256 x 132 dots , black / white | ||||||||
| Interlocks and Limits | ||||||||
| Reflected power | Yes | |||||||
| Overtemperature | Yes | |||||||
| Current limit | Yes | |||||||
| DC overload | Yes | |||||||
| RF power limit | Yes | |||||||
| Cooling | ||||||||
| Cooling | Air cooling | |||||||
| Air cooling requirement | 118 m/h3 | |||||||
| AC Power Line | ||||||||
| AC line voltage (1-phase) | 110 VAC/230 VAC (187 AC to 253 VAC) | |||||||
| AC line frequency | 50/60 Hz | |||||||
| AC line current (per phase) | 6.5 A nominal line, full power | |||||||
| AC input power | 1490 VA | |||||||
| Overcurrent limit (per phase) | 10 A to be created by user through fuse or circuit breaker | |||||||
| Efficiency line to load | 66% at full power, nominal line | |||||||
| Power factor | 97% to 99% at max power | |||||||
| AC mains connection | IEC 320 at full power | |||||||
| Physical Specification | ||||||||
| Packaging | 19" rack cabinet | |||||||
| Mounting | 19" rack mounting | |||||||
| Weight | 19.5 kg (43 lb) | |||||||
| Clearance | 60 mm (2.36") on each side for air flow into unit | |||||||
| Dimensions | 88 mm (H) x 483 mm (W) x 500 mm (D) | |||||||
| 3.46" (H) x 19" (W) x 19.69" (D) | ||||||||